Levitor RTP

The Levitor 4300 and 4200-series RTP system for 300- and 200mm semiconductor manufacturing, has been updated with a new process-portfolio. Our new process flexibility comes in combination with the Levitor RTP systems proven unparalleled uniformity, mass-production throughput and repeatability.

Levitrack ALD

Levitech introduces the Levitrackā„¢ 3rd Generation ALD system, this generation was developed with a focus on increased throughput and reduced maintenance cycles. The Levitrackā„¢ ALD system, Generation 3.0, is now available, with up to 6000 wafers / hour passivation capabilities.