The Levitor is a single-wafer Rapid Thermal Processing- system is based on the unique concept of conduction rather than the conventional method of radiation heating. This technology is used to rapidly heat and cool-down wafers.
The Levitrack Atomic Layer Deposition-system (ALD) is designed to deposit layers of atomic thicknesses at mass-production volume. This process provides passivation layers which increases the efficiency of solar cells. In Levitrack systems, wafer-substrates are introduced into a process-chamber while floating on a very thin gas layer, enabling conductive heating. After achieving process temperature, the substrates levitate without contact or force through a series of ALD deposition cells. The wafer is then rapidly cooled using conductive cooling.