Rapid Thermal Processing System - semiconductor
LEVO 6000
The LEVO 6000 is a single-wafer Rapid Thermal Processing (RTP) system based on the unique concept of contactless heat conduction through a gas bearing instead of conventional radiation-based heating.
The LEVO 6000’s novel and patented “gas-bearing” levitates the wafer between two high-mass blocks that provide a stable and uniform thermal environment.
Rapid Thermal Processing System - semiconductor
LEVO 6000
The LEVO 6000 is a single-wafer Rapid Thermal Processing (RTP) system based on the unique concept of contactless heat conduction through a gas bearing instead of conventional radiation-based heating.
The LEVO 6000’s novel and patented “gas-bearing” levitates the wafer between two high-mass blocks that provide a stable and uniform thermal environment.
Rapid Thermal Annealing System - semiconductor
LEVO SiC RTA
The LEVO SiC RTA is a single-wafer Rapid Thermal Annealing (RTA) system, specifically designed for processing semi-transparent Silicon Carbide (SiC) wafers and Gallium Nitride on Silicon (GaN-on-Si) wafers.
Rapid Thermal Annealing System - semiconductor
LEVO SiC RTA
The LEVO SiC RTA is a single-wafer Rapid Thermal Annealing (RTA) system, specifically designed for processing semi-transparent Silicon Carbide (SiC) wafers and Gallium Nitride on Silicon (GaN-on-Si) wafers.
Spatial Atomic Layer Deposition System – PHOTOVOLTAICS
Levitrack ALD
The Levitrack spatial Atomic Layer Deposition (s-ALD) system is designed for high-volume production of ultra-thin functional layers to improve solar cell efficiency, depositing passivation-, intermediate- and buffer layers.
For either single layers or multi-layer stacks, which are applied in next-generation solar cells such as perovskite-silicon tandems.
Spatial Atomic Layer Deposition System – PHOTOVOLTAICS
Levitrack ALD
The Levitrack spatial Atomic Layer Deposition (s-ALD) system is designed for high-volume production of ultra-thin functional layers to improve solar cell efficiency, depositing passivation-, intermediate- and buffer layers.
For either single layers or multi-layer stacks, which are applied in next-generation solar cells such as perovskite-silicon tandems.
PROJECTS
Engineering
From concept to production, our team ensures unmatched quality and innovation at every step.
PROJECTS
Engineering
From concept to production, our team ensures unmatched quality and innovation at every step.
