Levitrack ALD

The Levitrack Atomic Layer Deposition-system (ALD) is designed to deposit layers of atomic thicknesses at mass-production volume. This process provides passivation and intermediate layers which increases the efficiency of solar cells. The intermediate layers are multi stack layers. the multi stack is applied in the tandem cell of a standard cell with a perovskite cell on top. In Levitrack systems, wafer-substrates are introduced into a process-chamber while floating on a very thin gas layer, enabling conductive heating. After achieving process temperature, the substrates levitate without contact or force through a series of ALD deposition cells. The wafer is then rapidly cooled using conductive cooling.

Recent developments on the Levitrack system enabled multi-layer ALD in continuous mass-production of tandem solar cells.

More Information is available here!