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The defining feature of the Levitor technology is its ability to utilize high temperature gas to suspend the wafer during processing. As the wafer does not come into contact with the walls of the chamber, we say that the gas ‘levitates’ the wafer. Thus the names Levitech, Levitor and Levitrack are derived from the verb to levitate, defined as: to cause to rise in the air and float as if in defiance of gravity.