Levitech is a global player in production solutions for the IC and photovoltaic industries. A spin-off of ASM International, Levitech was established in 2009 around its core product, the Levitor™ system. This system is based on a revolutionary patented technology and used in the semiconductor industry for Rapid Thermal Processing (RTP). The Levitrack™ ALD system is a state-of-the-art production solution for the solar industry and is based on the innovative concept of precursor separation in space, instead of time, in combination with the unique floating wafer and conductive heating technology used in the Levitor RTP products. Levitech’s technology portfolio is strongly positioning the company for future growth.
The defining feature of the Levitor technology is its ability to utilize high temperature gas to suspend the wafer during processing. As the wafer does not come into contact with the walls of the chamber, we say that the gas ‘levitates’ the wafer. Thus the names Levitech, Levitor and Levitrack are derived from the verb to levitate, defined as: to cause to rise in the air and float as if in defiance of gravity.