The Levitrack™ ALD system is a mass production solution for fast ALD deposition of aluminum oxide (Al2O3) for advanced solar cell passivation capabilities. The unique design of the Levitrack allows for fast single side ALD growth under atmospheric conditions. READ MORE
The Levitor is a leading-edge system for advanced RTP processes. In addition to enabling time-temperature profiles and with unmatched insensitivity to emissivity variations, these systems are designed to achieve unparalleled inherent uniformity and repeatability. READ MORE
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