Almere, the Netherlands – December 09, 2016 – The Levitrack system at a leading Taiwanese cell manufacturer was upgraded to the Levitrack HP configuration and continues high volume cell manufacturing. ‘PERC cells produced by NSP belong to the top PV market segment. The Levitrack system is used in our PERC production.’ said Bob Chen, FAB director at Neo Solar Power. ‘Succesful introduction of the Levitrack HP system in high volume manufacturing at leading Asian cell manufacturers gives us confidence in increasing the share of Levitech in the PV equipment market.’ said Jaap Beijfersbergen, CEO of Levitech.
Levitech has developped the second generation of the Levitrack system: Levitrack HP. This system is optimized for solar cell passivation with ALD AL2O3 films in high volume manufacturing with peak throughput of 3600 wafers/hour and uptime of 95%. The optimization is based on the feedback from customer sites with mass production of PERC and N-type IBC cells. Main modifications are: geometery of the track process chamber, proprietary HP coating of process chamber walls and improved software control of wafer transport in the Levitrack HP. A larger process chamber allows larger tollerances to wafer bow, while flattening wafers with excessive bow by gas pressure of gas bearings. Optimized process chamber dimensions enable reliable wafer transport of production wafers with thickness of 100 to 300 micron without any adjustments of the Levitrack HP hardware. Proprietary coating prevents flaking of AL2O3 deposition from chamber walls and no cleaning of the Levitrack HP is needed while processing 300- to 500 thousand wafers.