LEVITRACK ALD

Levitrack Atomic Layer Deposition

The Levitrack spatial Atomic Layer Deposition (s-ALD) system is designed for mass-production environments, offering ultra-thin, high-quality passivation and functional layers for next-generation crystalline and tandem silicon solar cells. 

Utilizing Levitech’s proprietary gas-based wafer levitation and atmospheric spatial ALD technology, the Levitrack delivers high throughput, excellent film uniformity, and best-in-class Cost-of-Ownership.

The Levitrack can be applied in the following area’s:

    • Single-side ALD deposition of Al₂O₃ for surface passivation for PERC and TOPCon cells
    • Buffer layer deposition of SnO2 for perovskite-silicon tandem cells
    • Intermediate/multi-layer stack deposition for tandem solar cells
    • Cell encapsulation with Al2O3 layer

This system is ideally suited for passivating PERC and TOPCon cells, and multi-layer stacks for advanced perovskite-silicon tandem solar cells. Wafer substrates are transported without contact on a thin gas bearing, heated fast conductively with very low imposed thermal budget, and processed at atmospheric pressure without the need for vacuum systems.

Processes

Passivation

Single-side Al₂O₃ passivation for PERC and TOPCon cells

Buffer layer

SnO₂ buffer layer to protect Perovskite cells from sputter damage

Multi-layer stack

Intermediate/multi-layer deposition for tandem solar cells

Encapsulation

Highly conformal, pinhole-free, and precisely controlled thin films to protect sensitive materials

Features and Benefits

    • High throughput (up to 6000 wafers/hour)
    • Spatial Atomic Layer Deposition (s-ALD)
    • High-quality, conformal, dense layers with nanometer-level thickness control
    • Uniform single-side ALD deposition including Al₂O₃, TiO₂, and SnO₂
    • Configurable up to G12 size for crystalline silicon (c-Si) cells
    • Process at atmospheric pressure; no vacuum pumps required
    • Contactless wafer transport on floating gas layer (no surface damage)
    • Configurable with inline automation; single-cassette, or multi-cassette configurations suitable for pilot lines and full scale production.