Publications

Q3 2011

• Solid State Technology article on thermal wafer processing for Ni(Pt)Si contacts beyond 45nm.
• PVSEC 2011 poster by Levitech on High-throughput, in-line ald Al2O3 system called the Levitrack
• Solar Magazine of September 2011: Levitech’s Atomic Layer Deposition System to Ramp HVM for Solar Cell Makers

Q2 2011

• ANP article on innovative Dutch companies in the solar industry.

Q4 2010

• De Volkskrant article in a series on high potential start-ups (published nationally on 15-Nov-2010).

Q3 2010

• PVSEC 2010 paper by Eindhoven University of Technology on Recent progress in the development and understanding of Silicon Surface Passivation by Aluminum Oxide for Photovoltaics.
• PVSEC 2010 paper by Levitech on High-throughput, in-line ald Al2O3 system called the Levitrack
• PVSEC 2010 paper by ECN Solar Energy on A new integrated mc-Si cell and module design for high efficiencies processed on the Levitrack
• PVSEC 2010 poster by Levitech on High-throughput, in-line ald Al2O3 system called the Levitrack

• IRPS 2010 paper by Renesas Electronics Corp. on Pattern-independent NiPtSi by Partial Conversion with Low Metal-consumption Ratio on Levitor
• IEEE paper by ECN Solar Energy on Excellent rear side passivation on multi-crystalline silicon solar cells with 20nm uncapped Al₂O₃ layer: industrialization of ALD for solar cell applications on Levitrack
• Paper by Levitech on High Throughput ALD of Al2O3 films for Surface Passivation of Silicon Solar Cells on Levitrack

• Product spotlight Levitor: Oxidation
• Product spotlight Levitor: Silicidation
• Product spotlight Levitor: RTP for LED

Q3 2009

• Bits&Chips.nl ASMI-spin-off Levitech stapt in solar

• Bits&Chips.nl Levitech stapt uit schaduw ASMI

Q4 2009

• Bits&Chips.nl RTP-eenheid ASMI op eigen benen als Levitech